10-pm-order mechanical displacement measurements using heterodyne interferometry

Nguyen, TD; Higuchi, M; Vu, TT; Wei, D; Aketagawa, M

Aketagawa, M (corresponding author), Nagaoka Univ Technol, Dept Mech Engn, 1603-1 Kamitomioka, Nagaoka, Niigata 9402188, Japan.

APPLIED OPTICS, 2020; 59 (27): 8478

Abstract

In this paper, we present 10-pm-order mechanical displacement measurements using heterodyne interferometry. The measuring system includes a single-pat......

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