XPS investigation of 5N purity Al thin foils for MEMS devices

Bolli, E; Kaciulis, S; Mezzi, A; Montanari, R; Varone, A

Montanari, R (通讯作者)，Univ Roma Tor Vergata, Dipartimento Ingn Ind, Via Politecn 1, I-00133 Rome, Italy.

SURFACE AND INTERFACE ANALYSIS, 2023; 55 (6-7): 466

Abstract

Thin Al foils are promising materials for applications in devices of microelectromechanical systems (MEMS). In this work, three foils of high purity (......

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