Improved properties of the MEMS-type ion-sorption micropump

Grzebyk, T; Gorecka-Drzazga, A; Dziuban, JA

Grzebyk, T (reprint author), Wroclaw Univ Technol, Fac Microsyst Elect & Photon, PL-50372 Wroclaw, Poland.

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2017; 35 (6):

Abstract

In this paper, the authors demonstrate how to improve the properties of a recently elaborated microelectromechanical system (MEMS) ion-sorption microp......

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