Evolution of copper step beams during graphene growth by CVD method

Zhang, X; Guo, X; Wang, P; Sun, L; Bai, LY; Li, YL; Yu, FP; Zhao, X

Yu, FP; Zhao, X (通讯作者)，Shandong Univ, State Key Lab Crystal Mat, Ctr Opt Res & Engineer, Jinan 250100, Peoples R China.

APPLIED SURFACE SCIENCE, 2023; 610 ():

Abstract

Cu step beams (CSBs) are common products obtained when growing graphene by chemical vapor deposition (CVD), which markedly affects the quality of grap......

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