Design and Performance of ScAlN/AlN Trapezoidal Cantilever-Based MEMS Piezoelectric Energy Harvesters

Liu, Y; Hu, BH; Cai, Y; Zhou, J; Liu, WJ; Tovstopyat, A; Wu, GQ; Sun, CL

Sun, CL (corresponding author), Wuhan Univ, Inst Technol Sci, Wuhan 430072, Peoples R China.

IEEE TRANSACTIONS ON ELECTRON DEVICES, 2021; 68 (6): 2971

Abstract

In this work, we report a method to enlarge the trapezoidal cantilever-based harvester power by using the high-performance Sc0.2Al0.8N/aluminum nitrid......

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