MEMS based geophones and seismometers

Hou, Y; Jiao, R; Yu, HY

Yu, HY (corresponding author), Hong Kong Univ Sci & Technol, Dept Mech & Aerosp Engn, Hong Kong, Peoples R China.

SENSORS AND ACTUATORS A-PHYSICAL, 2021; 318 ():

Abstract

The recent development of Micro-Electro-Mechanical System (MEMS) technology has provided new methods for researchers to design and fabricate seismomet......

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