Phase composition of multilayer system TiN/CrN deposited by DC magnetron sputtering

Ormanova, M; Dechev, D; Bezdushnyi, R; Petrov, P

Ormanova, M (reprint author), Bulgarian Acad Sci, Inst Elect, Tzarigradsko Chausse 72, BU-1784 Sofia, Bulgaria.

BULGARIAN CHEMICAL COMMUNICATIONS, 2017; 49 ( ): 98