Depth Profile Analysis of Molybdenum Disulfide Film by Glow Discharge Mass Spectrometry

Wang, ML; Zhao, B; Zhuo, SJ; Zhu, YQ; Huang, L; Qian, R

Qian, R (corresponding author), Chinese Acad Sci, Shanghai Inst Ceram, Natl Ctr Inorgan Mass Spectrometry Shanghai, 1295 Ding Xi Rd, Shanghai 200050, Peoples R China.; Qian, R (corresponding author), Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, 19A Yuquan Rd, Beijing, Peoples R China.

ATOMIC SPECTROSCOPY, 2021; 42 (4): 183

Abstract

In this work, the depth profile analysis capability with direct current glow discharge mass spectrometry (dcGD-MS) was evaluated by examining molybden......

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