Temperature dependence of the electrical characteristics of ZnO thin film transistor with high-k NbLaO gate dielectric

Li, HC; Liu, YR; Geng, KW; Wu, WJ; Yao, RH; Lai, PT

Liu, YR (corresponding author), South China Univ Technol, Sch Microelect, Guangzhou 510640, Peoples R China.

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2021; 39 (1):

Abstract

ZnO thin film transistor with high-k NbLaO/SiO2 bilayer gate dielectric was fabricated by sputtering, and the temperature dependence of the electrical......

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