A PZT MEMS loudspeaker with a quasi-closed diaphragm

Ma, YF; Lu, Y; Deng, N; Zheng, QC; Cao, K; Wang, HP; Xie, HK

Lu, Y (通讯作者)，Beijing Inst Technol, Sch Integrated Circuits & Elect, Beijing 100081, Peoples R China.

SENSORS AND ACTUATORS A-PHYSICAL, 2023; 358 ():

Abstract

Piezoelectric MEMS speakers with non-closed diaphragms are promising to generate high sound pressure levels (SPLs), but a serious diaphragm breakage i......

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