Analytical Estimation of LER-like Variability in GAA Nano-Sheet Transistors

Amita; Gorad, A; Ganguly, U

Ganguly, U (reprint author), Indian Inst Technol, Dept Elect Engn, Bombay, Maharashtra, India.

2019 INTERNATIONAL SYMPOSIUM ON VLSI TECHNOLOGY, SYSTEMS AND APPLICATION (VLSI-TSA), 2019; ():

Abstract

FinFET and gate -all-around (GAA) devices such as Nanowire FET (NWFET) and Nano -sheet FET (NSFET) are prone to process induced variability. Line edge......

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