Effect of low-energy ion assistance on the properties of sputtered ZrB2 films

Schnitter, C; Petrov, I; Zhirkov, I; Hultman, L; Palisaitis, J; Rosen, J; Hogberg, H

Hogberg, H (通讯作者)，Linkoping Univ, Dept Phys Chem & Biol IFM, SE-58183 Linkoping, Sweden.

VACUUM, 2022; 195 ():

Abstract

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