Enhanced low-temperature response of Ga2O3-based oxygen sensor by modulating the surficial micro-nano structures

Zhao, JJ; Qin, BH; Liu, LH; Liang, CM; Zhang, YP; Yang, WJ; Wang, HY

Wang, HY (通讯作者),Guangdong Acad Sci, China Ukraine Inst Welding, Guangdong Prov Key Lab Adv Welding Technol, Guangzhou 510650, Peoples R China.

SENSORS AND ACTUATORS B-CHEMICAL, 2023; 378 ():

Abstract

Ga2O3 with three types of surficial micro-nano structures were achieved by high-vacuum radio-frequency magnetron sputtering, i.e., thin film, nanowire......

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