Nitrogen and water vapor pumping study on a 400 mm opening LN2 cooled sorption cryopump

Mukherjee, S; Panchal, P; Nayak, P; Gupta, V; Das, S; Mishra, J; Gangradey, R

Mukherjee, S (corresponding author), Inst Plasma Res, Gandhinagar 382428, Gujarat, India.

VACUUM, 2021; 184 ():

Abstract

To study the pumping speed of nitrogen and water vapor, 400 mm opening liquid nitrogen cooled sorption cryopump is developed in house and its applicab......

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