Fabrication of CVD duplicate diamond microgear

Liu, W; Lu, WZ; Wang, HJ; Pang, J

Lu, WZ (reprint author), Nanjing Univ Aeronaut & Astronaut, Coll Mech & Elect Engn, Nanjing, Jiangsu, Peoples R China.; Lu, WZ (reprint author), Nanjing Univ Aeronaut & Astronaut, Jiangsu Key Lab Precis & Micromfg Technol, Nanjing, Jiangsu, Peoples R Chin

INTEGRATED FERROELECTRICS, 2017; 182 (1): 104

Abstract

CVD diamond is an ideal processing material which is suitable for the Micro-Electro-Mechanical System parts, such as microgears, for its excellent per......

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