High sensitivity x-ray detectors based on 4H-SiC p-i-n structure with 80 mu m thick intrinsic layer

Liu, Q; Zhou, D; Xu, WZ; Chen, DJ; Ren, FF; Zhang, R; Zheng, YD; Lu, H

Zhou, D; Lu, H (corresponding author), Nanjing Univ, Collaborat Innovat Ctr Adv Microstruct, Sch Elect Sci & Engn, Nanjing 210093, Peoples R China.

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2021; 39 (2):

Abstract

In this work, a large size x-ray detector with a 25 mm(2) active area is demonstrated based on a thick 4H-SiC p-i-n structure. The detector exhibits o......

Full Text Link