Atomic Layer Deposited Ti2O3 Thin Films

Manjunath, K; Saraswat, A; Samrat, D; Rao, CNR

Rao, CNR (通讯作者),Jawaharlal Nehru Ctr Adv Sci Res, Int Ctr Mat Sci, Sch Adv Mat, New Chem Unit, Jakkur PO, Bengaluru 560064, India.

CHEMPHYSCHEM, 2022; 23 (10):