3.2-MP Back-Illuminated Polarization Image Sensor With Four-Directional Air-Gap Wire Grid and 2.5-mu m Pixels

Maruyama, Y; Terada, T; Yamazaki, T; Uesaka, Y; Nakamura, M; Matoba, Y; Komori, K; Ohba, Y; Arakawa, S; Hirasawa, Y; Kondo, Y; Murayama, J; Akiyama, K; Oike, Y; Sato, S; Ezaki, T

Maruyama, Y (reprint author), Sony Semicond Solut Corp, Atsugi, Kanagawa 2430014, Japan.

IEEE TRANSACTIONS ON ELECTRON DEVICES, 2018; 65 (6): 2544

Abstract

A 3.2-MP four-directional polarization image sensor with air-gap wire-grid polarizer is described. The image sensor was fabricated using a wafer proce......

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