Temperature-dependent Si-29 incorporation during deposition of highly enriched Si-28 films

Dwyer, KJ; Kim, HS; Simons, DS; Pomeroy, JM

Pomeroy, JM (reprint author), NIST, Gaithersburg, MD 20899 USA.

PHYSICAL REVIEW MATERIALS, 2017; 1 (6):

Abstract

In this study, we examine the mechanisms leading to Si-29 incorporation into highly enriched Si-28 films deposited by hyperthermal ion beams at elevat......

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