Silicon Nitride in Silicon Photonics

Blumenthal, DJ; Heideman, R; Geuzebroek, D; Leinse, A; Roeloffzen, C

Blumenthal, DJ (reprint author), Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA.

PROCEEDINGS OF THE IEEE, 2018; 106 (12): 2209

Abstract

The silicon nitride (Si3N4) planar waveguide platform has enabled a broad class of low-loss planar-integrated devices and chip-scale solutions that be......

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