Film bulk acoustic resonators with 400 MHz ultrawide-range tunability using crystalline PZT thin film

Cai, XY; Zhang, KH; Wu, JH; Li, J; Jin, H; Dong, SR; Chen, JK; Xuan, WP; Luo, JK

Jin, H; Luo, JK (通讯作者),Zhejiang Univ, Coll Informat Sci & Elect Engn, Hangzhou 310027, Peoples R China.

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2023; 167 ():

Abstract

Tunable and switchable film bulk acoustic resonators (FBARs) have great application potential owing to their much-increased flexibility in radiofreque......

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