Accurate and efficient height extraction in chromatic confocal microscopy using corrected fitting of the differential signal

Chen, C; Yang, WJ; Wang, J; Lu, WL; Liu, XJ; Jiang, XQ

Lu, WL (reprint author), Huazhong Univ Sci & Technol, Sch Mech Sci & Engn, State Key Lab Digital Mfg Equipment & Technol, Wuhan 430074, Hubei, Peoples R China.

PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2019; 56 (): 447

Abstract

Accurate and efficient peak extraction algorithm is essential in real-time chromatic confocal measurement. However, current state-of-art algorithms ca......

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