Current conduction mechanisms in thermal nitride and dry gate oxide grown on 4H-silicon carbide (SiC)

Liu, L; Yang, YT

Liu, L (reprint author), Xidian Univ, Sch Microelect, Xian 710071, Shaanxi, Peoples R China.

JOURNAL OF ADVANCED OXIDATION TECHNOLOGIES, 2017; 20 (1):

Abstract

Current conduction mechanisms of SiC metal-oxide-semiconductor (MOS) capacitors on n-type 4H-SiC with or without NO annealing have been investigated i......

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