Two-Dimensional Theoretical Modeling and Experimental Investigations of Micromachined Thermal Expansion-Based Angular Motion Sensor

Luo, HH; Wang, XY; Duan, MZ; Cabot, J; Lee, YK

Luo, HH; Lee, YK (corresponding author), Hong Kong Univ Sci & Technol, Dept Mech & Aerosp Engn, Hong Kong, Peoples R China.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2021; 30 (1): 42

Abstract

A two-dimensional (2D) model was developed, for the first time, to describe the characteristics of the micromachined thermal expansion-based angular m......

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