期刊： JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2021; 30 (2)
This study proposes a highly stable differential resonant accelerometer that is monolithically micro-machined from a piece of ultrapure, single z-cut ......
期刊： JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2021; 30 (4)
This letter reports a novel approach for ultra-low stress die attachment for microelectromechanical system (MEMS) devices based on a stacked multilaye......
期刊： JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2021; 30 (2)
A design of electric split-ring metamaterial (eSRM) with tunable terahertz (THz) free spectra range (FSR) characteristic is presented. The proposed eS......
期刊： JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2021; 30 (4)
A self-powered micro-electromechanical systems (MEMS) inertial switch has been proposed for potential wake-up application without additional power con......
期刊： JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2021; 30 (4)
In this paper, a liquid-based micro thermal convective accelerometer (MTCA) is optimized by the Rayleigh number (Ra) based compact model and fabricate......
期刊： JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2021; 30 (3)
In this paper, we propose a non-contact ultrasonic liquid flowmeter based on AlN piezoelectric micromachined ultrasonic transducer (PMUT) arrays. Two ......
期刊： JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2021; 30 (3)
Microalgae concentrations have been studied as an important factor to reflect water qualities. High concentration of microalgae should cause water eut......
期刊： JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2021; 30 (4)
An increasing demand for surface acoustic wave filters with high performances contributes to the necessity of reducing sizes and costs. The present wo......
期刊： JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2021; 30 (2)
In the above article [1], the content of this article remains untouched. Only Table III is rectified. The stiffness of the proposed MOEMS acceleromete......
期刊： JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2021; 30 (4)
Silicon MEMS resonators are increasingly being adopted for applications in timing and frequency control, as well as precision sensing. It is well esta......
期刊： JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2021; 30 (2)
In this paper, electret based vibration energy harvesters are designed and fabricated with perforated electrode based on MEMS technology. Through-hole......
期刊： JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2021; 30 (4)
The V-shaped electrothermal actuator has gained significant popularity as it was demonstrated to be a compact, stable and high rectilinear displacemen......
期刊： JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2021; 30 (2)
This paper reports a precision mode-localized accelerometer operating in a higher-order flexural mode. The accelerometer consists of two symmetric res......
期刊： JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2021; 30 (4)
In this paper, a new approach for enhancing the temperature sensitivity of a resonant MEMS thermometer, based on parametric modulation, is proposed. B......
期刊： JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2021; 30 (1)
A two-dimensional (2D) model was developed, for the first time, to describe the characteristics of the micromachined thermal expansion-based angular m......
