Deep learning denoising of SEM images towards noise-reduced LER measurements

Giannatou, E; Papavieros, G; Constantoudis, V; Papageorgiou, H; Gogolides, E

Giannatou, E (reprint author), Nanometrisis Pc, Thessaly, Greece.

MICROELECTRONIC ENGINEERING, 2019; 216 ():

Abstract

As chip sizes decrease and node dimensions break the sub-10 nm barrier, Line Edge Roughness (LER) metrology becomes a critical issue for the semicondu......

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