Enhancement in the tribological performance of WSx/a-C multilayer films with Al sublayers in vacuum

Yang, FE; Zhang, WK; Wang, GQ; Wang, T; Zheng, XH

Zheng, XH (corresponding author), Zhejiang Univ Technol, Coll Mat Sci & Engn, Hangzhou 310014, Peoples R China.

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2021; 39 (3):

Abstract

The manufacturing of multilayer films with improved mechanical and tribological properties has attracted attention recently for enabling their space a......

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