筛选条件 共查询到62条结果
排序方式
Effects of thickness and interlayer on optical properties of AlN films at room and high temperature

期刊: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2021; 39 (4)

This paper investigates the systematic influence of thickness (136-412nm) and temperature (300-860K) on the refractive index and the band-edge of alum......

Temperature dependent performance of ITO Schottky contacts on beta-Ga2O3

期刊: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2021; 39 (5)

Sputtered indium tin oxide (ITO) was used as a rectifying contact on lightly n-type (n similar to 10(16)cm(-3)) beta -Ga2O3 and found to exhibit excel......

Nonadiabatic localization of H-2 in the field of two external positive tip charges

期刊: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2021; 39 (5)

For two external spherical tips with equal positive charges, the ground state of a hydrogen molecule is variationally determined within the quantum Mo......

Influence of plasma power on deposition mechanism and structural properties of MoOx thin films by plasma enhanced atomic layer deposition

期刊: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2021; 39 (3)

In this study, amorphous films of molybdenum oxide (MoOx) had been prepared by plasma enhanced atomic layer deposition (PEALD) technique using molybde......

Epitaxial growth of 3C-SiC film by microwave plasma chemical vapor deposition in H-2-CH4-SiH4 mixtures: Optical emission spectroscopy study

期刊: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2021; 39 (2)

Microwave (MW) plasma in silane-hydrogen and silane-hydrogen-methane mixtures is used effectively for chemical vapor deposition of Si, SiC, diamond, a......

Enhancement in the tribological performance of WSx/a-C multilayer films with Al sublayers in vacuum

期刊: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2021; 39 (3)

The manufacturing of multilayer films with improved mechanical and tribological properties has attracted attention recently for enabling their space a......

Plasma-jet sterilization enhanced by ion wind

期刊: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2021; 39 (3)

This work demonstrates that a needle-ring discharge device combined with an ion-wind generator can realize a plasma-jet system of self-inlet gas, repl......

Topotactic crystal structure transformation from spinet ferrite to wustite in epitaxial Fe3O4 films via Kr ion irradiation

期刊: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2021; 39 (3)

Krypton ion irradiation was carried out on Fe3O4 epitaxial thin films grown on MgO (0 0 1) substrates. The spinel structure (Fd (3) over barm) of Fe3O......

Multiple carrier transport in high-quality alpha-Sn films grown on CdTe (001) by molecular beam epitaxy

期刊: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2021; 39 (3)

The epitaxial growth of tin in an alpha phase (alpha -Sn) is desired for its topological properties. In this study, we have successfully grown a serie......

Band alignment modulation of atomic layer deposition-prepared Al2O3/beta-Ga2O3 heterojunction interface by deposition temperature

期刊: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2021; 39 (3)

The band alignment between oxygen plasma-assisted atomic layer deposition Al2O3 films and beta -Ga2O3 (-201) substrates under different deposition tem......

Novel in situ sensing surface forces apparatus for measuring gold versus gold, hydrophobic, and biophysical interactions

期刊: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2021; 39 (2)

The surface forces apparatus (SFA) was developed in the late 1960s as a powerful tool for investigating molecular interactions across apposing surface......

Material properties and performance of ErAs:In(Al)GaAs photoconductors for 1550 nm laser operation

期刊: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2021; 39 (2)

ErAs:In(Al)GaAs photoconductors have proven to be outstanding devices for photonic terahertz (0.1-10THz) generation and detection with previously repo......

Multi-technique investigation of Ni-doped ZnO thin films on sapphire by metalorganic chemical vapor deposition

期刊: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2021; 39 (2)

Optical and material properties of nickel-doped zinc oxide (ZnO-Ni) grown by metalorganic chemical vapor deposition with varying Ni source flow rates ......

Dependence of inherent selective atomic layer deposition of FeOx on Pt nanoparticles on the coreactant and temperature

期刊: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2021; 39 (1)

Selective growth of metal oxides on metal via atomic layer deposition (ALD) has attracted great interest due to their potential applications in the se......

共62条页码: 1/5页15条/页