Band alignment modulation of atomic layer deposition-prepared Al2O3/beta-Ga2O3 heterojunction interface by deposition temperature

Zhou, S; Liu, H; Dong, LP; Liu, WG; Song, SG; Liu, WJ

Zhou, S (corresponding author), Xian Technol Univ, Sch Optoelect Engn, Xian 710021, Peoples R China.

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2021; 39 (3):

Abstract

The band alignment between oxygen plasma-assisted atomic layer deposition Al2O3 films and beta -Ga2O3 (-201) substrates under different deposition tem......

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