Temperature dependent performance of ITO Schottky contacts on beta-Ga2O3

Xia, XY; Xian, MH; Fares, C; Ren, F; Tadjer, M; Pearton, SJ

Pearton, SJ (corresponding author), Univ Florida, Dept Mat Sci & Engn, Gainesville, FL 32611 USA.

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2021; 39 (5):

Abstract

Sputtered indium tin oxide (ITO) was used as a rectifying contact on lightly n-type (n similar to 10(16)cm(-3)) beta -Ga2O3 and found to exhibit excel......

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