MEMS-Based Wavelength-Selective Bolometers

Dao, TD; Doan, AT; Ishii, S; Yokoyama, T; Orjan, HS; Ngo, DH; Ohki, T; Ohi, A; Wada, Y; Niikura, C; Miyajima, S; Nabatame, T; Nagao, T

Dao, TD; Nagao, T (reprint author), NIMS, Int Ctr Mat Nanoarchitecton MANA, 1-1 Namiki, Tsukuba, Ibaraki 3050044, Japan.; Nagao, T (reprint author), Hokkaido Univ, Grad Sch Sci, Dept Condensed Matter Phys, Kita Ku, Kita 10 Nishi 8, Sapporo, Hokkaido 06008

MICROMACHINES, 2019; 10 (6):

Abstract

We propose and experimentally demonstrate a compact design for membrane-supported wavelength-selective infrared (IR) bolometers. The proposed bolomete......

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