Pre-deposition growth of interfacial SiO2 layer by low-oxygen-partial-pressure oxidation in the Al2O3/4H-SiC MOS structure

Zhai, DY; Lv, ZP; Zhao, Y; Lu, JW

Lu, JW (corresponding author), Hunan Univ, Coll Elect & Informat Engn, Changsha 410082, Peoples R China.

MICROELECTRONIC ENGINEERING, 2021; 244 ():