An improved scanning probe-based lithography: Site-controlled formation of self-assembled film as an etch mask

Chen, P; Wu, L; Gao, J; Feng, CQ; Yu, BJ; Qian, LM

Yu, BJ (corresponding author), Southwest Jiaotong Univ, Tribol Res Inst, State Key Lab Tract Power, Chengdu 610031, Peoples R China.

MICROELECTRONIC ENGINEERING, 2021; 244 ():

Abstract

A self-assembled 1H,1H,2H,2H-perfluorodecyltriethoxysilane (PFDS) film was prepared on a diamond tip scratched silicon surface, and presented stronger......

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