Contributions on the control of the VGF crystal growth process

Ecklebe, S; Gehring, N; Woittennek, F; Winkler, J

Ecklebe, S (通讯作者)，Tech Univ Dresden, Inst Regelungs & Steuerungstheorie, Fak Elektrotech & Informationstechn, Dresden, Germany.

AT-AUTOMATISIERUNGSTECHNIK, 2023; 71 (3): 232

Abstract

The VGF method is a modern process for the growth of single crystals, the basis for almost all electronic applications. The gradual solidification of ......

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