Effects of thickness and interlayer on optical properties of AlN films at room and high temperature

Liu, Y; Yang, ZL; Long, XJ; Zhang, X; Yan, MX; Huang, D; Ferguson, IT; Feng, ZCA

Liu, Y (corresponding author), South China Univ Technol, Sch Phys, Guangzhou 510006, Peoples R China.; Liu, Y (corresponding author), Guangxi Univ, Sch Phys Sci & Technol, Lab Optoelect Mat & Detect Technol, Guangxi Key Lab Relativist Astrophys, Nanning 530004, Peoples R China.

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2021; 39 (4):

Abstract

This paper investigates the systematic influence of thickness (136-412nm) and temperature (300-860K) on the refractive index and the band-edge of alum......

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