Annealing temperature-dependent structural and electrical properties of (Ta2O5)(1-x)& nbsp;- (TiO2)(x)& nbsp;thin films, x <= 0.11

Thapliyal, P; Kandari, AS; Lingwal, V; Panwar, NS; Rao, GM

Thapliyal, P (corresponding author), HNB Garhwal Univ, Dept Instrumentat Engn, Srinagar, Uttarakhand, India.

CERAMICS INTERNATIONAL, 2021; 47 (9): 12066

Abstract

(Ta2O5)1-x- (TiO2)x (TTOx) thin films, with x = 0, 0.03, 0.06, 0.08, and 0.11, were deposited using magnetron direct current (DC) sputtering method on......

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