A Multilayered Structure for Packageless Acoustic-Wave Devices With Ultra-Small Sizes

Shen, JY; Fu, SL; Su, RX; Xu, HP; Lu, ZT; Zeng, F; Song, C; Wang, WB; Pan, F

Fu, SL; Pan, F (corresponding author), Tsinghua Univ, Sch Mat Sci & Engn, Key Lab Adv Mat MOE, Beijing 100084, Peoples R China.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2021; 30 (4): 589

Abstract

An increasing demand for surface acoustic wave filters with high performances contributes to the necessity of reducing sizes and costs. The present wo......

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