ALD Heterojunction Ovonic Threshold Switches

Adinolfi, V; Laudato, M; Clarke, R; Jewhurst, S; McBriarty, ME; Hoang, S; Narasimhan, VK; Cheng, LX; Littau, KA

Adinolfi, V; Littau, KA (corresponding author), Intermolecular, San Jose, CA 95134 USA.

ACS APPLIED ELECTRONIC MATERIALS, 2020; 2 (12): 3818

Abstract

Conformal atomic layer deposition (ALD) of chalcogenide films would enable aggressive 3D integration of nonvolatile memories; unfortunately, the fabri......

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