Reactive Sputtering of Aluminum Nitride (002) Thin Films for Piezoelectric Applications: A Review

Iqbal, A; Mohd-Yasin, F

Mohd-Yasin, F (reprint author), Griffith Univ, Queensland Micro & Nanotechnol Ctr, Nathan, Qld 4111, Australia.

SENSORS, 2018; 18 (6):

Abstract

We summarize the recipes and describe the role of sputtering parameters in producing highly c-axis Aluminum Nitride (AlN) films for piezoelectric appl......

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