Tradeoff Control of Multi-exposure Lithography for SU-8 Photochemical Reaction Channel Formation

Chen, QM; Zhou, JY; Hu, YM; Zheng, Q

Zhou, JY (corresponding author), Guangdong Univ Technol, Sch Phys & Optoelect Engn, Guangzhou 510006, Peoples R China.

BIOCHIP JOURNAL, 2020; 14 (4): 369

Abstract

A method involving multi-exposure with low-power is presented to fabricate an SU-8 mold based on a digital micromirror device (DMD) maskless lithograp......

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