On Enhancing the Sensitivity of Resonant Thermometers Based on Parametric Modulation

Li, CX; Xi, JQ; Wang, Y; Li, FZ; Gao, L; Liu, HF; Zhao, C; Tu, LC

Zhao, C (corresponding author), Huazhong Univ Sci & Technol, MOE Key Lab Fundamental Phys Quant Measurement, Wuhan 430074, Peoples R China.; Zhao, C (corresponding author), Huazhong Univ Sci & Technol, Hubei Key Lab Gravitat & Quantum Phys, PGMF, Wuhan 430074, Peoples R China.; Zhao, C (corresponding author), Huazhong Univ Sci & Technol, Sch Phys, Wuhan 430074, Peoples R China.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2021; 30 (4): 539

Abstract

In this paper, a new approach for enhancing the temperature sensitivity of a resonant MEMS thermometer, based on parametric modulation, is proposed. B......

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