MEMS-based resistive hydrogen sensor with high performance using a palladium-gold alloy thin film

Gong, J; Wang, ZH; Tang, YK; Sun, JH; Wei, XY; Zhang, QM; Tian, G; Wang, HR

Wang, HR (通讯作者),Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 710049, Shaanxi, Peoples R China.

JOURNAL OF ALLOYS AND COMPOUNDS, 2023; 930 ():

Abstract

Hydrogen sensors have been widely used in several fields for monitoring the concentration of hydrogen and for its alarming leakage. In this study, a m......

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